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NEXIV VMZ-R3020 - Higher speeds and greater precision than ever before

Magnification, AF and illumination conditions can be finely adjusted for each specimen. VMZ-R3020 offers a 300 x 200 mm stroke suitable for measurement of small components such as mechanical parts, molded parts and high-density PCBs.

Key benefits

  • Six types of optical zooming head
  • Detection of 0.1 mm transparent layer
  • 8-segment ring illumination with three incident angles
  • High measuring accuracy
  • Faster throughput
  • 15x high-speed zoom

Applications

  • Surface analysis, Surface examination
  • Plastic manufacturing, Metal manufacturing
  • Cracks and Failure AnalysisI
  • Micro-electronics, Opto-electronics
  • Telecom & electronics, Antennae, Telescope optics
 
Benefits & features
 

nikon metrology vision systems standard magnification zooming heads NEXIV VMZ R3020Standard magnification zooming heads: type 1 - 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.


nikon metrology vision systems high magnification zooming heads NEXIV VMZ R3020

High magnification zooming heads: type 4, TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.


 

nikon metrology vision systems wide fov zooming head NEXIV VMZ R3020

Wide field-of-view zooming head: type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.


Magnification vs. Field of view (mm)

Standard magnification zooming heads
Type 1
Optical magnification Total magnification Field of View (mm) 0.5× 18× 9.33×7.01 1× 36×
4.7×3.5
2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467
Type 2
Optical magnification Total magnification Field of View (mm) 1× 36× 4.7×3.5 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 15× 540× 0.311×0.233
Type 3
Optical magnification Total magnification Field of View (mm) 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 30× 1080× 0.155×0.117

 

High magnification zooming heads
Type 4
Optical magnification Total magnification Field of View (mm) 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 32× 1152× 0.146×0.109 60× 2160× 0.07×0.068
Type TZ
Optical magnification Total magnification Field of View (mm) 1× 36×
4.7×3.5
2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467 16× 576× 0.291×0.218
32× 1152× 0.146×0.109 64× 2304× 0.073×0.055 120× 4320× 0.039×0.029    

 

Wide field-of-view zooming head
Type A
Optical magnification Total magnification Field of View (mm) 0.35× 12.6× 13.3×10 0.6× 21.6× 7.8×5.8 1× 36×
4.7×3.5
1.8× 64.8× 2.6×1.9 3.5× 126× 1.33×1

 

* Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.


Detection of 0.1 mm transparent layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

nikon metrology vision systems focus on top surface in red NEXIV VMZ R3020Focus on top surface in rednikon metrology vision systems focus on bottom surface in blue NEXIV VMZ R3020Focus on bottom surface in bluenikon metrology vision systems new ttl laser af NEXIV VMZ R3020New TTL Laser AF The new sensor detects laser beams reflected on both top and bottom surfaces


8-segment ring illumination with three incident angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

nikon metrology vision systems 8 segment ring illumination NEXIV VMZ R3020

* The incident angle of the 8-segment ring illuminator for type 4 is 50 degrees and for type A is 18 degrees.


nikon metrology vision systems ModuRay NEXIV VMZ R3020

Measuring accuracy is further improved

Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.


Faster throughput

High rate of data transfer combined with fast illumination control provides faster throughput.


15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).

nikon metrology vision systems 15x high speed zoom NEXIV VMZ R3020

 

 
Specifications
Stroke (X x Y x Z) 300 x 200 x 200 mm (11.8 x 7.8 x 7.8 in.) 250 x 200 x 200 mm (9.8 x 7.8 x 7.8 in.) (with type TZ at low magnification)
Minimum readout 0.01 µm
Maximum workpiece weight 20 kg (44.1 lb.)
Measuring uncertainty EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement uncertainty EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
Camera Black & white 1/3” CCD, Color 1/3” CCD (option)*
* For type 1, 2 and A only
Working distance Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF)
Magnification vs. field of view Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm
Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm
Type TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm
Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm
Auto focus Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option.
Illumination Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring)
Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators
Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power source AC 100-240V 50/60Hz
Power consumption 5A-2.5A
Dimensions & weight (W x D x H) Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint 2100 x 1100 mm
 
Brochures
NEXIV VMZ R-Series
NEXIV VMZ R-Series

en fr es

Industrial Instruments General Catalogue
Industrial Instruments General Catalogue

en de es

Overview brochure
Overview brochure
 
Case studies
Clamason presses ahead with rapid video measurement
Clamason presses ahead with rapid video measurement

With the acquisition of a Nikon Nexiv CNC Video Measuring System, Clamason Industries is now able to check small, tightly toleranced parts and maintain high production levels. It can closely monitor the quality of complex pressed components, without compromising its production schedule.

en

 
Inspection and measurement of Cataract lens
Inspection and measurement of Cataract lens

The demand for intraocular lens (IOL) used in cataract surgery is increasing. Nikon`s New NEXIV Metrology instrument has overcome difficulties with soft, foldable materials and is capable of measuring the critical dimensions using search capability and vision auto focus.

en

 
Inspection and measurement of electronics connectors
Inspection and measurement of electronics connectors

The design of electronic connectors for many applications has become more complex in recent years. As the design and manufacturing requirements for these connectors has become more complex, the need for a faster, more accurate, more highly automated inspection of finished connectors has increased.

en

 
Inspection and Measurement of LED Light
Inspection and Measurement of LED Light

Recently LED light demand is increasing rapidly due to conservation of the environment. LED is mounted on the die and this position and tilting is very critical for efficient brightness. In order to check big volume LED, measurement requires high accuracy and throughput.

en

 
Inspection and measurement of Medical MEMS
Inspection and measurement of Medical MEMS

A Medical MEMS (Micro-Electro Mechanical System) is a miniature implantable device often used to continuously monitor health issues like blood pressure or blood analysis, providing data to remote locations and require full 100 percent inspection.

en

 
Inspection and measurement of Multi-Lumen Tubing
Inspection and measurement of Multi-Lumen Tubing

Multi-Lumen tubing typically has a number of individual channels running through its interior. Variables in sample dimensions that must be measured include outer diameter, numerous inner diameters, and various wall and web thicknesses.

en

 
Inspection and measurement of Probe Cards
Inspection and measurement of Probe Cards

A probe card is a mechanical interface between an electronic test system and a semiconductor wafer. Probe tip position and geometry is critical to the proper function of the probe card and a stable and highly accurate platform is necessary to perform these complex measurements.

en

 
Inspection and Measurement of Solar Cells
Inspection and Measurement of Solar Cells

Use of photovoltaic solar cells has grown rapidly in recent years and is expected to continue into the future. They are used in a wide variety of applications, but must adere to strict quality standards, so a fast, accurate, highly automated inspection method is required.

en

 
Inspection and Measurement of Wire Bond Loop Height
Inspection and Measurement of Wire Bond Loop Height

Wire bonding is the method of making interconnections between an integrated circuit (IC) or other semiconductor device and its packaging during semiconductor device fabrication. Controlling the Loop Height of a wire bond is very important and requires accurate measurement to guarantee device integrity.

en

 
Video Measuring System Ensures Diamond Quality for Waterjets
Video Measuring System Ensures Diamond Quality for Waterjets
A CNC video measuring system from Nikon Metrology helps Diamond Technology Innovations produce a more accurate diamond waterjet orifice.

en

 
 
Industrial applications
 

Brochures

NEXIV VMZ R-Series
NEXIV VMZ R-Series

en fr es

Industrial Instruments General Catalogue
Industrial Instruments General Catalogue

en de es

Overview brochure
Overview brochure

Case studies

Clamason presses ahead with rapid video measurement
Clamason presses ahead with rapid video measurement

en

Inspection and measurement of Cataract lens
Inspection and measurement of Cataract lens

en

Inspection and measurement of electronics connectors
Inspection and measurement of electronics connectors

en

Inspection and Measurement of LED Light
Inspection and Measurement of LED Light

en

Inspection and measurement of Medical MEMS
Inspection and measurement of Medical MEMS

en

Inspection and measurement of Multi-Lumen Tubing
Inspection and measurement of Multi-Lumen Tubing

en

Inspection and measurement of Probe Cards
Inspection and measurement of Probe Cards

en

Inspection and Measurement of Solar Cells
Inspection and Measurement of Solar Cells

en

Inspection and Measurement of Wire Bond Loop Height
Inspection and Measurement of Wire Bond Loop Height

en

Video Measuring System Ensures Diamond Quality for Waterjets
Video Measuring System Ensures Diamond Quality for Waterjets

en