Hide message

Cookies on the Nikon Metrology website
We use cookies to ensure we give you the best experience on our website. If you continue we'll assume
that you are happy to receive all cookies on the Nikon Metrology website.
Find out more about our cookie policy

Nikon Metrology NV | Europe
Change location
Change location
America's
Europe
& Rest of the world
 
 
 
Request info
 
 

NEXIV VMZ-R6555 - Higher speeds and greater precision than ever before.

nikon metrology vision systems NEXIV VMZ R6555Magnification, AF and illumination conditions can be finely adjusted for each specimen.
VMZ-R6555 offers 650 x 550 mm stroke, which is suitable for large components and "step-and-repeat" measurements of multiple pieces on the stage.

Key benefits

  • Six types of optical zooming head
  • Detection of 0.1 mm transparent layer
  • 8-segment ring illumination with three incident angles
  • High measuring accuracy
  • Faster throughput
  • 15x high-speed zoom

Applications

  • Surface analysis, Surface examination
  • Plastic manufacturing, Metal manufacturing
  • Cracks and Failure AnalysisI
  • Micro-electronics, Opto-electronics
  • Telecom & electronics, Antennae, Telescope optics
 
Benefits & features
 

nikon metrology vision systems standard magnification zooming heads NEXIV VMZ R6555Standard magnification zooming heads: type 1 - 3

Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.


nikon metrology vision systems high magnification zooming heads NEXIV VMZ R6555High magnification zooming heads: type 4, TZ

Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.


nikon metrology vision systems wide fov zooming head NEXIV VMZ R6555Wide field-of-view zooming head: type A

Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.


Magnification vs. Field of view (mm)

Standard magnification zooming heads
Type 1
Optical magnification Total magnification Field of View (mm) 0.5× 18× 9.33×7.01 1× 36×
4.7×3.5
2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467
Type 2
Optical magnification Total magnification Field of View (mm) 1× 36× 4.7×3.5 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 15× 540× 0.311×0.233
Type 3
Optical magnification Total magnification Field of View (mm) 2× 72× 2.33×1.75 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 30× 1080× 0.155×0.117

 

High magnification zooming heads
Type 4
Optical magnification Total magnification Field of View (mm) 4× 144× 1.165×0.875 8× 288× 0.582×0.437 16× 576× 0.291×0.218 32× 1152× 0.146×0.109 60× 2160× 0.07×0.068
Type TZ
Optical magnification Total magnification Field of View (mm) 1× 36×
4.7×3.5
2× 72× 2.33×1.75 4× 144× 1.165×0.875 7.5× 270× 0.622×0.467 16× 576× 0.291×0.218
32× 1152× 0.146×0.109 64× 2304× 0.073×0.055 120× 4320× 0.039×0.029    

 

Wide field-of-view zooming head
Type A
Optical magnification Total magnification Field of View (mm) 0.35× 12.6× 13.3×10 0.6× 21.6× 7.8×5.8 1× 36×
4.7×3.5
1.8× 64.8× 2.6×1.9 3.5× 126× 1.33×1

 

* Total magnification is that of a video window with 640 × 480 pixels on a 24-inch WUXGA monitor (1920 × 1200 pixels) recommended for the VMZ-R series.


Detection of 0.1 mm transparent layer

Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.

nikon metrology vision systems focus on top surface in red NEXIV VMZ R6555Focus on top surface in rednikon metrology vision systems focus on bottom surface in blue NEXIV VMZ R6555Focus on bottom surface in bluenikon metrology vision systems new ttl laser af NEXIV VMZ R6555New TTL Laser AF The new sensor detects laser beams reflected on both top and bottom surfaces


8-segment ring illumination with three incident angles

Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.

nikon metrology vision systems 8 segment ring illumination NEXIV VMZ R6555

* The incident angle of the 8-segment ring illuminator for type 4 is 50 degrees and for type A is 18 degrees.


nikon metrology vision systems ModuRay NEXIV VMZ R6555

Measuring accuracy is further improved

Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.


Faster throughput

High rate of data transfer combined with fast illumination control provides faster throughput.


15x High-speed Zoom

5-step high-speed zoom with a zoom ratio of 15x allows both wide field-of-view at low magnification and high-resolution observation at high magnification (type 1 – 4).

nikon metrology vision systems 15x high speed zoom NEXIV VMZ R6555

 

 
Specifications
Stroke (X x Y x Z) 650 x 550 x 200 mm (25.6 x 21.7 x 7.8 in.) 600 x 550 x 200 mm (23.6 x 21.7 x 7.8 in.) (with type TZ, at low magnification)
Minimum readout 0.01 µm
Maximum workpiece weight 50 kg (110.2 lb.)
Measuring uncertainty EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement uncertainty EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
Camera Black & white 1/3” CCD, Color 1/3” CCD (option)*
* For type 1, 2 and A only
Working distance Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination)
Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens
Type A: 73.5mm (63 mm with laser AF)
Magnification vs. field of view Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm
Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm Type
TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm
Auto focus Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF Type A comes with vision AF as standard and with laser AF as an option
Illumination Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring)
Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators
Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power source AC 100-240V 50/60Hz
Power consumption 5A-2.5A
Dimensions & weight (W x D x H) Main unit & table: 1200 x 1640 x 1820 mm / 665 kg (47.2 x 52.8 x 64.6 in. / 1466 lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint 2400 x 2000 mm
 
Brochures
NEXIV VMZ R-Series
NEXIV VMZ R-Series

en fr es

Industrial Instruments General Catalogue
Industrial Instruments General Catalogue

en de es

Overview brochure
Overview brochure
 
Case studies
NEXIV gives DEK the edge in emulsion screen dimensional deposition measurement
NEXIV gives DEK the edge in emulsion screen dimensional deposition measurement

By investing in a Nikon Nexiv CNC video measuring system, DEK Screens has significantly improved the accuracy and precision of its emulsion screen processes, leading to enhanced quality and reduced wastage.

en

 
 
Industrial applications
 

Brochures

NEXIV VMZ R-Series
NEXIV VMZ R-Series

en fr es

Industrial Instruments General Catalogue
Industrial Instruments General Catalogue

en de es

Overview brochure
Overview brochure

Case studies

NEXIV gives DEK the edge in emulsion screen dimensional deposition measurement
NEXIV gives DEK the edge in emulsion screen dimensional deposition measurement

en