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iNEXIV VMA-6555 - Flexible, large stroke video measuring system

nikon metrology vision systems iNEXIV VMA 6555 with touch probeiNEXIV VMA 6555 with touch probeThe iNEXIV VMA series CNC video measuring system offers the ultimate in usability for automatic measuring of various 3D components with a large FOV, long working distance and wide XYZ stroke.

Suitable for large samples (450 x 400 x 200 mm or larger) and simultaneous measurement of multiple parts. High cost-performance with the same strong cast-iron body and direct bearing as the high end models. The VMA-6555V is for video measuring, while the VMA-6555 is touch-probe ready.


  • Surface analysis, Surface examination, Manual examination,
  • Plastic manufacturing, Metal manufacturing
  • Implants/ Protheses, Mobile phones, shavers & watches
  • Micro-electronics, Opto-electronics
  • Telecom & electronics, Antennae, Telescope optics
Benefits & features

Wide field of view and sharp, clear images

A wide FOV of up to 13 mm x 10 mm (at 0.35x) allows easy search and alignment of measuring targets. The 10x zoom with five specific steps provides accurate measurement as well as high resolution images. An excellent Apochromat objective lens with high NA (0.11) and low distortion has been specially designed for the iNEXIV series, providing crisp, clear images.

nikon metrology vision systems 23.5 coin sample iNEXIV VMA 6555

nikon metrology vision systems working distance iNEXIV VMA 6555Robust 73.5 mm working distance

A long 73.5 mm working distance minimizes the possibility of contact between the objective lens and valuable parts. It is ideal for measuring large step heights, tall bosses and deep holes.

Large XY stroke and long Z stroke

The XY stroke of the VMA-6555V/6555 is 650 x 550 mm and is suitable for measurement of large samples and simultaneous measurement of multiple parts. The extended 200 mm Z-axis stroke is ideal for tall workpieces.

Auto Focus with high repeatability

Fast and accurate vision AF

Highly repeatable vision AF offers high-speed, high-precision focusing and height/depth measurement.

nikon metrology vision systems af implant iNEXIV VMA 6555

Even the bottom of a small diameter hole can be brought into correct focus.

nikon metrology vision systems af option iNEXIV VMA 6555Laser AF (option)

The Laser AF with a long 63 mm working distance is optionally available, enabling height measurement of flat surfaces with high repeatability, in keeping a wide FOV at a low magnification.

Versatile illuminations

Episcopic (top), diascopic (bottom) and 8-segment-ring (with 18-degree oblique angle) LED illuminators enable accurate detection of low contrast edges.

nikon metrology vision systems versatile illuminations iNEXIV VMA 6555

Any 8-segment light can be selected for effective edge detection.

Intelligent search

Even when a workpiece is misaligned, the system automatically searches the target location based on the target image recorded in a teaching file, enabling accurate, automatic measurement by eliminating possible detection errors.

nikon metrology vision systems intelligent search iNEXIV VMA 6555

nikon metrology vision systems digital chart comparator iNEXIV VMA 6555Digital chart comparator

Deviation of contours can be checked by overlaying charts generated digitally from 2D CAD data onto video images. Digital charts always accompany video images.

Options for expanding measurement possibilities

nikon metrology vision systems touch probe option iNEXIV VMA 6555Touch probe for measurement of imperceptible parts from top and bevel angle


The VMA-6555 is touch-probe ready and accommodates optional Renishaw® TP20 or TP200 touch probes to measure 3D shapes parts where vision AF cannot be used. Touch probe and vision measuring are seamlessly switched, since the touch probe works coaxially as the optical axis using dedicated software.

nikon metrology vision systems touch probe measurement iNEXIV VMA 6555

Extended 1.5x high-magnification

Each model can be modified before shipment to extend magnification to 1.5x, powerful enough for precise measurement of minute electronic parts.

*Video measuring images are slightly darker than that of standard magnification.

nikon metrology vision systems extended 1.5x high magnification coin sample iNEXIV VMA 6555

Sample: Φ23.5 mm coin


Stroke (X x Y x Z) 650 x 550 x 200 mm
Measurement range withTP
(Touch Probe) *1
600 x 550 x 166 mm (TP20)
600 x 550 x 170 mm (TP200)
650 x 550 x 200 mm (withVision AF)
Measurement range withTP & MCR20 *2 525 x 550 x 166 mm (TP20)
525 x 550 x 170 mm (TP200)
575 x 550 x 200 mm (withVision AF)
Minimum readout 0.1 µm
Maximum workpiece weight 50 kg
Maximum workpiece weight (accuracy guaranteed) 30 kg
Maximum permissible error *3
(L = Lengthin mm)
EUX,MPE EUY,MPE: 2+6L/1000 µm
EUXY,MPE: 3+6L/1000 µm
EUZ,MPE: 3+L/100 µm
Camera 1/3-in. progressive scan b/w camera (standard), 1/3-in. progressive scan color camera (optional)
Working distance 73.5 mm (63 mm withLaser AF)
Magnification Optical: 0.35 to 3.5x (0.52x to 5.2x high magnification is available as an option)
On screen: 12.6 to 126x with24-inch WUXGA (1920 x 1200 pixels) monitor
FOV size on stage 13.3 x 10 mm to 1.33 x 1 mm (8.9 x 6.7 mm to 0.89 x 0.67 mm withhigh-magnification option)
Auto focus Vision AF and optional Laser AF
Illumination Contour illumination: White LED diascopic illumination
Surface illumination: White LED episcopic illumination
Oblique illumination: 8-segment white LED ring illumination
Video resolution 640 x 480 (pixels)
Touch probe (optional) *1 Renishaw® TP200/TP20
Power source 100 V-240 V, 50/60 Hz
Power consumption 5 A (100 V) - 2.5 A (240 V)
Dimensions & weight Main body withtable (W x D x H): 1200 x 1640 x 1553 mm, 665 kg
Controller: 145 x 400 x 390 mm, 14 kg
Operational environment Temperature: 10°C to 35°C
Humidity: 70% or less
Accuracy guaranteed temperature 20°C ±0.5K
  Host computer
CPU Intel® Core™ 2 Duo CPU or faster
Memory 4GB or more
OS Windows® 7 32bit
Interface USB2.0 / IEEE1394


*1The touch probe can only be attached to the VMA-6555, and not to the VMA-6555V.
*2The iNEXIV-dedicated MCR20 can be used for bothTP20 and TP200.
*3Nikon's in-house test at 20°C ±0.5k



Contact Us
42.517726, -83.698139

Nikon Metrology, Inc

12701 Grand River Avenue
Brighton, MI 48116
United States

Email: sales.nm-us@nikon.com
Website: www.nikonmetrology.com
Telephone number: (810) 220-4360

33.649429, -117.710097

Nikon Metrology, Inc (California)

12 Goodyear, Suite #105
Irvine, CA 92618
United States

Email: sales.nm-us@nikon.com
Website: www.nikonmetrology.com
Telephone number: (949) 716-4440

32.916631, -96.986003

Nikon Metrology, Inc (Texas)

8113 Ridgepoint Dr.
Irving, TX 75063
United States

Email: sales.nm-us@nikon.com
Telephone number: (810) 220-4360

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