BW-Series - Accurate sub-nano-surface profiler with non-contact measurement

nikon metrology industrial microscopes white light interferometric microscope BW SeriesNikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.



Benefits & features

Superior measurement performance

  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
  • Enables measurements with the same height resolution in a wide range of magnifications.
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
  • Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible


SiC Wafer: Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 2 5x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 5x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 10x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 20x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 50x BW Series

nikon metrology industrial microscopes white light interferometric microscope Silicon Carbide SiC Wafer 100x BW Series


Nano-level measurement of razor-edge with high-magnification lens

Subject: Razor-edge

nikon metrology industrial microscopes white light interferometric microscope razor edge BW Series


Surface roughness of paper (Synthetic, Plain, Gloss, Matt)

nikon metrology industrial microscopes white light interferometric microscope Surface roughness of synthetic paper BW SeriesSurface roughness of synthetic paper
nikon metrology industrial microscopes white light interferometric microscope Surface roughness of gloss paper BW SeriesSurface roughness of gloss paper
nikon metrology industrial microscopes white light interferometric microscope Surface roughness of plain paper BW SeriesSurface roughness of plain paper
nikon metrology industrial microscopes white light interferometric microscope Surface roughness of matte paper BW SeriesSurface roughness of matt paper


Surface roughness of ceramics

nikon metrology industrial microscopes white light interferometric microscope Surface roughness of ceramics BW Series


Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

nikon metrology industrial microscopes white light interferometric microscope Precise surface measurement BW Series

 


IC package: Micrometer-range measurement in a wide range of magnifications

nikon metrology industrial microscopes white light interferometric microscope IC Package Micrometer range measurement in a wide range of magnifications BW Series


Height calibration with the NIST-certified VLSI standard

nikon metrology industrial microscopes white light interferometric microscope Certificate of calibration BW Series


BW-D501 system

nikon metrology industrial microscopes white light interferometric microscope BW D501 system BW Series


Specifications

 High Pixel Resolution Model
 BW-S501BW-S502BW-S503BW-S505BW-S506BW-S507
Measurement optical system Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm) 1pm (0.001 nm)
Step height measurement reproducibility σ: 8nm / 8m step height measurement
Number of pixels 2046 x 2046, 1022 x 1022 (selectable via software)
Height measurement time 38 s, 16 s / 10 μm scan
Height measurement range < 90 μm < 20 mm < 90 μm < 20 mm
Measurement field size (using 2.5X) < 4448 x 4448 μm*
Piezo actuator Objective lens driven Nosepiece driven
Z axis Manual Electric Manual Electric
XY axis Manual Electric Manual Electric
Software Bridgelements® software modules

 

 High Speed Model
 BW-D501BW-D502BW-D503BW-D505BW-D506BW-D507
Height resolution (algorithm) 1 pm (0.001 nm)
Step height measurement reproducibility σ8nm / 8m step height measurement
Number of pixels 510x510
Height measurement time 4 s / 10 μm scan
Height measurement range < 90 μm < 20 mm < 90 μm < 20 mm
Measurement field size < 2015 x 2015 μm *
Piezo actuator Objective lens driven Nosepiece driven
Z axis Manual Electric Manual Electric
XY axis Manual Electric Manual Electric
Software Bridgelements® software modules


* The range can be extended by changing the relay lens or by stitching.

 

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