Advanced, versatile semiconductor inspection and wafer management systems.
Manufacturing equipment from steppers to the most sophisticated inspection systems has given Nikon invaluable experience in the field of microelectronics. This experience has allowed Nikon to become a worldwide leader in microelectronics technology and in the manufacture of advanced instruments designed specifically for the production and inspection of semiconductors and flat panel displays.
Products
subcategories
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NEXIV FOUP
Non-contact, fully automated wafer carrier measuring system.
Wafers, Telescope optics, Antennae, Powertrain Components, Telecom & Electronics, Automated measurement…
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Optistation-7
300mm inspection station delivering high precision, throughput, accuracy and ease of use.
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Optistation-3000
An inspection system and analysis tool for R&D defect analysis delivering high-speed transfer and system stability.
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Optistation-3100
Compact, cost-effective solution for 300mm wafer inspection in diverse applications.
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Optistation-3200
300mm wafer inspection system featuring Nikon's renowned CFI60 optics and newly designed DUV microscope.
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P3
Designed for automated pattern profile management and line width roughness monitoring of 300mm wafers.
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NWL200
Advanced IC inspection wafer loader capable of loading 100µm thin wafers.
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Eclipse L200N Series
200mm wafer and mask inspection microscope systems for reflected light defect identification.
Wafers, Telescope optics, Antennae, Telecom & Electronics, Mobile phones, shavers & watches
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Eclipse LV-DAF
An upright microscope with dynamic auto-focus that brings fast, versatile focus to the Eclipse LV semiconductor inspection microscope series and OEM applications.
Telescope optics, Antennae, Telecom & Electronics, Mobile phones, shavers & watches
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Eclipse LV150 Series
Modular reflected light microscope systems for wafer inspection and materials science applications.
Implants/Protheses, Surface Examination, Wafers, Liquid Crystal Displays, Telescope optics, Antennae…
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Eclipse L300 Series
300mm wafer and mask inspection microscope systems for reflected light defect identification.
Wafers, Liquid Crystal Displays, Telescope optics, Antennae, Telecom & Electronics, Mobile phones, shavers & watches
