By continuously tracking robot positioning and using a closed feedback loop to return the acquired metrology data to the robots, Nikon Metrology is able to reach absolute robot accuracy of 0.1 micron. As this approach bypasses the effects of robot warm-up, drift and backlash, it transforms industrial robots into highly accurate and efficient in-line manufacturing stations.

iGPS or an Optical CMM? The number of measurements both metrology systems can perform simultaneously is more than sufficient to track and adjust robot motion. With iGPS there are no limitations as to the number of simultaneous measurements, Optical CMM is limited to 1024.

A K-Series Optical CMM tracks robot motion at a sample rate of up to 1000Hz. With iGPS, this is lower.

The metrology system can either be a K-Series Optical CMM or an iGPS system. In the first case a tracking volume of 17m³ is offered, which can be expanded by adding additional Optical CMM units. When using iGPS, the tracking volume is much larger, and also expandable.

The metrology system makes the robot aware of deflections by measuring the relative positions of the target and the robot as it moves towards it. The robot is able to coordinate that data on-line and make the necessary compensations instantaneously.